Plasma cleaning machine

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Microwave plasma equipment

Microwave plasma equipment

  • Category:Microwave Plasma
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  • Release time:2023-12-12 14:32:14
  • Product description

Product features:

(1) Automatic control interface and touch screen man-machine interface, easy to operate and real-time process monitoring at any time.

(2) Unique cavity design, good cleaning uniformity, high cleaning quality.

(3) Plasma cleaning has the characteristics of high repeatability, strong controllability, high utilization rate, no pollution and low operating cost.

(4) Different combinations of cavity structures are suitable for different types of products, components or vehicles.

(5) A wide range of applications, such as semiconductor packaging industry, semiconductor power devices, etc


Technical parameters:

Serial number

Model number

AS-V100

1

Overall dimensions of equipment

Length × depth × height =1200mm×800mm×1750mm

2

Vacuum chamber size

Length × depth × height =450mm×450mm×610mm

3

Power frequency

2.45GHz

4

Power supply

600w

5

Electrode plate specifications

Non-standard customization

6

Software control

PLC touch screen

7

Gas purity requirement

Industrial grade gas or better

8

Loadable gas

O₂ / N₂/ Ar


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