Plasma cleaning machine

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What are the factors that affect the effect of plasma cleaning?

2024-02-27 08:36:22
times

Because the cleaning needs of various industries are different, many people choose plasma cleaning machine, in the cleaning work for various reasons, will lead to the cleaning effect is not ideal, what are the factors affecting the effect of plasma cleaning?

electrode


Because the electrode is exposed to plasma, some electrodes made of defective data are prone to sputtering, which affects the stability of plasma cleaning. The spacing of the smaller electrodes can limit the plasma to a small area to obtain a higher density of plasma, and achieve fast cleaning, on the contrary, the spacing is increased, and the cleaning speed is also decreased. Electrodes are usually used as trays, and larger electrodes can clean more objects at one time, improving cleaning power. Therefore, the electrode data, layout and scale have obvious influence on the plasma cleaning effect.


pressure

Pressure is one of the important parameters of vacuum plasma cleaning, and the density of plasma will also increase as the pressure increases, which can significantly improve the speed of plasma cleaning. In addition, the change of working pressure will cause the change of plasma cleaning reaction mechanism.


Power and frequency

The power supply of the plasma cleaning machine has an impact on various parameters, such as electrode temperature, self-bias, cleaning power, etc. The output power is added, and the cleaning speed is strengthened; The density of the plasma will also gradually increase with the addition of frequency, so the cleaning power can be improved.

gas

The selection of gas is a key step in plasma cleaning, although most gases or mixed gases can remove pollutants, but the role and speed of cleaning will be several times or even ten times, which shows that reasonable selection of gas can greatly improve the cleaning speed.

What are the factors that affect the effect of plasma cleaning? The above points will directly affect the cleaning effect of the plasma cleaning machine. Before purchasing the plasma cleaning machine or before use, it is necessary to do the corresponding process verification according to the cleaning data and stains, in order to obtain a good cleaning effect.


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