Detailed protection of online plasma cleaners - AtV online plasma cleaners

1. Self-check vacuum pump oil level and oil purity, monthly self-check vacuum pump oil level and oil purity, investigate the oil level window. When the oil level is close to the lower red line scale, add to the oil red line between the upper and lower; Investigate the color of the oil. Normal oil is clean and clear. When the oil is cloudy (the oil color becomes gray or the oil level window is fuzzy) and the vacuum pump noise is abnormal, replace the vacuum body oil in time.

2. On-line plasma cleaner cleans the echo chamber. First scrub the vacuum chamber with a nonfat cotton cloth dipped in anhydrous ethanol (commonly known as alcohol) (do not scrub the echo chamber investigation glass with ethanol). Gas (argon + oxygen or nitrogen + oxygen) is introduced into the second chamber, and the residue in the chamber is removed by plasma reaction. At least once a month, the stripping period is about 10 minutes.

3. The plasma cleaning machine should check the integrity of the plastic pipe and the sealing of the vacuum body, and the integrity of the self-test equipment. After thoroughly cleaning the echo chamber, avoid leakage of contaminants into the cavity. Self-check whether the seal of the echo chamber door is loose. Check whether each gas pipe is securely connected and aged.

4. Check whether the voltage of the vacuum plasma cleaner of the power supply matches that of the device.

Detailed protection of online plasma cleaner:

1. Self-check vacuum pump oil level and oil purity, monthly self-check vacuum pump oil level and oil purity, investigate the oil level window. When the oil level is close to the lower red line scale, add to the oil red line between the upper and lower; Investigate the color of the oil. Normal oil is clean and clear. When the oil is cloudy (the oil color becomes gray or the oil level window is fuzzy) and the vacuum pump noise is abnormal, replace the vacuum body oil in time.

2. On-line plasma cleaner cleans the echo chamber. First scrub the vacuum chamber with a nonfat cotton cloth dipped in anhydrous ethanol (commonly known as alcohol) (do not scrub the echo chamber investigation glass with ethanol). Gas (argon + oxygen or nitrogen + oxygen) is introduced into the second chamber, and the residue in the chamber is removed by plasma reaction. At least once a month, the stripping period is about 10 minutes.

3. The plasma cleaning machine should check the integrity of the plastic pipe and the sealing of the vacuum body, and the integrity of the self-test equipment. After thoroughly cleaning the echo chamber, avoid leakage of contaminants into the cavity. Self-check whether the seal of the echo chamber door is loose. Check whether each gas pipe is securely connected and aged.

4. Check whether the voltage of the vacuum plasma cleaner of the power supply matches that of the device.