Vacuum on-line plasma equipment

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Product features:

● Cost-effective, can be converted through components and vehicles, compatible with different shapes of large and small pieces of material.

● Automatic mode reduces human factors, reduces secondary pollution and saves labor costs.

● The surface activity of the equipment is significantly enhanced after cleaning, and the uniformity and adhesion are significantly improved.

● Screen animation displays the working status of the whole line, real-time monitoring of the running process.

● It is equipped with other functions such as automatic taking, transmission, feeding and so on.

真空在线式等离子设备

Technical parameters:

Serial number	Model number	AV-P4
1	Overall dimension	Length × width × height =2140mm×1340mm×1760mm
2	Reaction chamber size	Length × width × height =320mm×610mm×50mm
3	Plasma generator	Frequency 13.56MHz, power 0-600W adjustable, automatic impedance matching
4	Gas path system	Standard configuration 2 way (O₂Ar/H₂), mass flowmeter control, gas flow 0-200ml/min adjustable
5	Control system	Touch screen +PLC automatic control, manual + automatic 2 kinds of operation
6	Receiving size	Length 150-270mm, width 35-95mm
7	efficiency	4 channels 4 tablets, about 500 tablets/hour
8	Application technology	IC packaging technology LED packaging technology